Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate
2007-07-24
2007-07-24
Fuller, Rodney (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for original
C355S053000
Reexamination Certificate
active
10874690
ABSTRACT:
A transport box for transporting a lithographic patterning device and a lithographic apparatus adapted to cooperate with the transport box are presented. The transport box is provided with a container part having an inner space with a storing position for storing the patterning device and an opening for the transfer of the patterning device. The box also includes a closure part for closing the opening, and a channel system for evacuating and/or feeding gasses from/to the inner space the box.
REFERENCES:
patent: 5843196 (1998-12-01), Leavey et al.
patent: 6267123 (2001-07-01), Yoshikawa et al.
patent: 6619903 (2003-09-01), Friedman et al.
patent: 2006/0078407 (2006-04-01), del Puerto et al.
Ham Erik Leonardus
Heerens Gert-Jan
Lansbergen Robert Gabriël Maria
Meijer Ellart Alexander
Meijer Hendricus Johannes Maria
ASML Netherlands B.V.
Fuller Rodney
Pillsbury Winthrop Shaw & Pittman LLP
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