Lithographic apparatus and patterning device transport

Details Lithographic apparatus and patterning device transport Lithographic apparatus and patterning device transport

2006-12-19

2006-12-19

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S077000

Reexamination Certificate

active

07151589

ABSTRACT:
According to an embodiment, a box for transporting a lithographic patterning device is arranged to cooperate with a lithographic apparatus. The transport box may be provided with a container part having an inner space with a storing position for storing the patterning device and an opening for the transfer of the patterning device. Prior to transfer of the patterning device from the inner space to the apparatus, the inner space is pressurized. The box may also comprise a closure part for closing the opening, and/or a channel system for evacuating and/or feeding gasses from/to the inner space of the box. Other embodiments include a lithographic apparatus comprising and/or configured to cooperate with such a box.

REFERENCES:
patent: 6863733 (2005-03-01), Tanabe
patent: 2003/0021671 (2003-01-01), Edo
patent: 2003/0049101 (2003-03-01), Seita
patent: 2005/0002003 (2005-01-01), Hoogkamp et al.

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