Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1991-10-24
1993-05-11
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156643, 156345, 21912119, 21912168, 21912183, 356364, 356382, 356138, B44C 122, B23K 1500, G01J 400, G01B 1106
Patent
active
052098133
ABSTRACT:
A lithographic method and a lithographic apparatus ar disclosed in which the height of a silicon wafer making up an object of lithography is accurately measured. A lithographic apparatus such as an electron beam apparatus having a height-measuring instrument built therein is effectively used for forming a pattern on the order of submicrons.
Ando Hiroyoshi
Iwasaki Teruo
Kaneko Toshio
Kawasaki Katsuhiro
Matsuoka Genya
Hitachi , Ltd.
Powell William A.
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