Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-04-18
2006-04-18
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000, C355S069000, C355S071000
Reexamination Certificate
active
07030963
ABSTRACT:
A lithographic apparatus includes an illumination system configured to provide a beam of radiation, a support configured to support a patterning device, a substrate table and a projection system. Furthermore, the lithographic apparatus includes a plurality of EUV sources for providing EUV radiation to the illumination system and a distributor which is arranged to convert the EUV radiation from each of the EUV sources into an intermediate beam of radiation. The intermediate beam of radiation is directed from the distributor in a first direction by a mirror surface. The distributor may include a rotationally driven mirror arrangement, the axis of rotation being non-parallel to the mirror surface.
REFERENCES:
patent: 5801870 (1998-09-01), Oka et al.
patent: 6154259 (2000-11-01), Hargis et al.
patent: 6323936 (2001-11-01), Charbonnier et al.
patent: 2004/0129895 (2004-07-01), Goldstein et al.
Bakker Levinus Pieter
Banine Vadim Yevgenyevich
Jonkers Jeroen
Loopstra Erik Roelof
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Rutledge D.
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