Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate
2006-03-14
2006-03-14
Nguyen, Kiet T. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
C250S492200
Reexamination Certificate
active
07012264
ABSTRACT:
A lithographic apparatus is provided. The apparatus includes an illumination system that conditions a beam of radiation, an article support member that supports an article to be placed in a beam path of the beam of radiation on the article support, and a movable carriage for moving the article support member. The carriage includes a compartmented composite structure provided with a non-composite mounting interface and/or cooling interface With such an arrangement, conventional interfacing using, for example metal or ceramic materials, can be applied in combination with the advantages of composite structures, such as a low specific weight, a high Young's modulus at places and directions where required, high strength, high stability, and high electrical resistivity.
REFERENCES:
patent: 6055899 (2000-05-01), Feit et al.
patent: 6387185 (2002-05-01), Doering et al.
Jacobs Hernes
Terken Martinus Arnoldus Henricus
Van Der Schoot Harmen Klaas
Vosters Petrus M H
Zaal Koen J J M
ASML Netherlands B.V.
Nguyen Kiet T.
Pillsbury Winthrop Shaw & Pittman LLP
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