Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2005-04-12

2005-04-12

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000

Reexamination Certificate

active

06879377

ABSTRACT:
A lithographic projection apparatus includes a conduit that supplies utilities to a movable component in a vacuum chamber such as an object table, associated motor or sensor. The conduit comprises flexible metal bellows preventing out-gassing of the conduit due to the vacuum in the vacuum chamber while allowing movement of the movable component in at least a first degree of freedom.

REFERENCES:
patent: 4993696 (1991-02-01), Furukawa et al.
patent: 5901754 (1999-05-01), Elsasser et al.
patent: 6510755 (2003-01-01), Higuchi et al.
patent: 20010023522 (2001-09-01), Watson et al.
patent: 20030047941 (2003-03-01), Thomas et al.
patent: 1 148 389 (2001-10-01), None
patent: 5-198490 (1993-08-01), None
patent: 6-275486 (1994-09-01), None

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