Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2008-01-08
2008-01-08
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S077000, C430S030000, C430S311000, C427S600000, C427S553000
Reexamination Certificate
active
07317504
ABSTRACT:
A lithographic apparatus and device manufacturing method makes use of a high refractive index liquid confined in a reservoir13at least partly filling the imaging field between the final element of the projection lens and the substrate. Bubbles forming in the liquid from dissolved atmospheric gases or from out-gassing from apparatus elements exposed to the liquid are detected and removed so that they do not interfere with exposure and lead to printing defects on the substrate. Detection can be carried out by measuring the frequency dependence of ultrasonic attenuation in the liquid and bubble removal can be implemented by degassing and pressurizing the liquid, isolating the liquid from the atmosphere, using liquids of low surface tension, providing a continuous flow of liquid through the imaging field, and phase shifting ultrasonic standing-wave node patterns.
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Banine Vadim Yevgenyevich
Bisschops Theodorus Hubertus Josephus
De Smit Joannes Theodoor
Dierichs Marcel Mathijs Theodore Marie
Modderman Theodorus Marinus
ASML Netherlands B.V.
Mathews Alan
Pillsbury Winthrop Shaw & Pittman LLP
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