Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-06-22
2010-02-02
Lee, Diane I (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C359S665000
Reexamination Certificate
active
07656502
ABSTRACT:
An immersion lithographic projection apparatus is disclosed in which a liquid removal system surrounds a liquid supply system which provides liquid to a space between a projection system and a substrate. The liquid removal system is moveable relative to the liquid supply system and is controlled to have substantially zero velocity relative to the moving substrate table. The gap between the liquid supply system and the liquid removal system may be covered and the atmosphere between the liquid supply system and the liquid removal system above the substrate table may be maintained such that the vapor pressure of liquid is relatively high.
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Gilissen Noud Jan
Jacobs Hernes
Jansen Hans
Kate Nicolaas Ten
Kemper Nicolaas Rudolf
ASML Netherlands B.V.
Lee Diane I
Pillsbury Winthrop Shaw & Pittman LLP
Whitesell-Gordon Steven H
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