Radiant energy – Irradiation of objects or material
Reexamination Certificate
2011-04-19
2011-04-19
Porta, David P (Department: 2884)
Radiant energy
Irradiation of objects or material
Reexamination Certificate
active
07928412
ABSTRACT:
A lithographic apparatus configured to project a patterned beam of radiation onto a target portion of a substrate is disclosed. The apparatus includes a first radiation dose detector and a second radiation dose detector, each detector comprising a secondary electron emission surface configured to receive a radiation flux and to emit secondary electrons due to the receipt of the radiation flux, the first radiation dose detector located upstream with respect to the second radiation dose detector viewed with respect to a direction of radiation transmission, and a meter, connected to each detector, to detect a current or voltage resulting from the secondary electron emission from the respective electron emission surface.
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International Search Report for International Application No. PCT/NL2007/050469 mailed Jan. 15, 2009, 5 pgs.
Banine Vadim Yevgenyevich
De Kuster Johannes Peterus Henricus
Gielissen Kurt
Moors Johannes Hubertus Josephina
Sidelnikov Yurii Victorovitch
ASML Netherlands B.V.
Gaworecki Mark R
Porta David P
Sterne Kessler Goldstein & Fox P.L.L.C.
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