Optics: measuring and testing – By alignment in lateral direction
Reexamination Certificate
2006-02-22
2009-10-13
Lee, Diane I (Department: 2851)
Optics: measuring and testing
By alignment in lateral direction
C355S053000, C355S072000, C355S075000
Reexamination Certificate
active
07602489
ABSTRACT:
A lithographic apparatus includes a displacement measuring system to measure a position of a moveable object with respect to a reference frame of the lithographic apparatus, in at least three coplanar degrees of freedom (x, y, Rz) of an orthogonal x-y-z coordinate system centered in the center of the moveable object. The moveable object includes a support structure configured to support a patterning device or a substrate table configured to support a substrate. The displacement measuring system includes at least three sensor heads, each sensor head being positioned with a measuring direction substantially coplanar with the x-y plane of the coordinate system and each sensor head being furthermore positioned with the measuring direction substantially perpendicular to a connection line connecting the sensor head with the center of the movable object and extending coplanar with the x-y plane.
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Eussen Emiel Jozef Melanie
Van Der Pasch Engelbertus Antonius Fransiscus
ASML Netherlands B.V.
Lee Diane I
Pillsbury Winthrop Shaw & Pittman LLP
Whitesell-Gordon Steven H
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