Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2004-07-22
2008-11-04
Nguyen, Hung Henry (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000
Reexamination Certificate
active
07446849
ABSTRACT:
A lithographic apparatus is disclosed. The apparatus includes a projection system configured to project a patterned radiation beam onto a target portion of a substrate. The projection system includes a housing and a plurality of optical elements arranged in the housing. The apparatus also includes an inlet for feeding conditioned gas to the housing and a gas exhaust for exhausting the conditioned gas from the housing for providing a gas conditioned environment in the housing. At least one gate is provided for providing communication of the gas conditioned environment with ambient atmosphere. The gate is arranged to provide a predetermined leakage of the conditioned gas to the ambient atmosphere.
REFERENCES:
patent: 5701169 (1997-12-01), Yoshioka
patent: 6222610 (2001-04-01), Hagiwara et al.
patent: 6630985 (2003-10-01), Hase
patent: 6671033 (2003-12-01), Akagawa et al.
Gellrich Bernard
Jansen Bauke
Loopstra Erik Roelof
Sanderse Rens
Van De Vijver Yuri Johannes Gabriel
ASML Netherlands B.V.
Carl Zeiss SMT AG
Nguyen Hung Henry
Pillsbury Winthrop Shaw & Pittman LLP
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