Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2007-04-10
2007-04-10
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C430S302000
Reexamination Certificate
active
11015770
ABSTRACT:
A lithographic apparatus arranged to transfer a pattern from a patterning device onto a substrate is disclosed. The apparatus includes an optics compartment that contains a patterned surface of the patterning device and an optical element, and a substrate compartment connected to the optics compartment by a connection that is arranged to pass a patterned beam of radiation from the optical element to the substrate. The apparatus also includes a first flush gas inlet arranged to supply a first flush gas into the connection, a second flush gas inlet adjacent to the patterned surface and arranged to supply a second flush gas into the optics compartment and to create a region adjacent the patterned surface in which the second flush gas flows in a direction with a component normal to and away from the patterned surface, and a gas pump arranged to pump the flush gases from the optics compartment.
Ham Erik Leonardus
Heerens Gert-Jan
Liebregts Paulus Martinus Maria
Loopstra Erik Roelof
Moors Johannes Hubertus Josephina
ASML Netherlands B.V.
Kim Peter B.
Pillsbury Winthrop Shaw & Pittman LLP
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