Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2006-10-10
2006-10-10
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000
Reexamination Certificate
active
07119874
ABSTRACT:
A lithographic projection apparatus wherein a liquid supply system provides a space between a projection system and a substrate with liquid. The liquid supply system comprises a member. A liquid seal is formed between the member and the substrate by a flow of liquid. In an embodiment, the liquid seal is formed by a flow of liquid from an inlet to an outlet of the member.
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Cox Henrikus Herman Marie
Donders Sjoerd Nicolaas Lambertus
Hoogendam Christiaan Alexander
Kolesnychenko Aleksey Yurievich
Loopstra Erik Roelof
ASML Netherlands B.V.
Nguyen Henry Hung
LandOfFree
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