Lithographic apparatus

Details Lithographic apparatus Lithographic apparatus

2004-05-19

2008-09-09

Nguyen, Hung Henry (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S069000

Reexamination Certificate

active

07423730

ABSTRACT:
A lithographic apparatus including means for selectively transmitting a projection beam before imaging the patterned projection beam onto a substrate. The means may include any of the following: a selectively transmitting device disposed downstream of a patterning device in the direction of the projection beam, a fixed and a moving set of masking blades in a scanning system or an array of switchable elements. The means may be provided to a mask table/holder or to a frame or structure of the lithographic projection apparatus.

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“European Search Report dated Mar. 3, 2004.”
Office Action in Japanese Patent Application No. 2004-157062, dated Jun. 15, 2007.

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