Refrigeration – Storage of solidified or liquified gas – Liquified gas transferred as liquid
Patent
1993-07-09
1995-08-15
Capossela, Ronald C.
Refrigeration
Storage of solidified or liquified gas
Liquified gas transferred as liquid
137341, F17C 1300
Patent
active
054408873
ABSTRACT:
A liquid vaporizer-feeder has a unitary housing structure for both a control valve for controlling the amount of a liquid passing therethrough and a vaporization valve for causing the liquid from the control valve to be vaporized and transported out by a carrier gas. The housing structure has a throughhole through which the two valves are connected. The throughhole is short and narrow, and has a portion made even narrower such that the pressure in the liquid passing therethrough is increased, preventing bubbles from forming in the throughhole. As a result, vaporized liquid can be supplied at a steadier rate, for example, to a reaction chamber.
REFERENCES:
patent: 2704085 (1955-03-01), Beiger et al.
patent: 2981278 (1961-04-01), Bergson
patent: 3950959 (1976-04-01), Couraeu
patent: 4255646 (1981-03-01), Dragoy et al.
patent: 5012839 (1991-05-01), Rogers et al.
Nishizato Hiroshi
Ono Hirofumi
Applied Materials Inc.
Capossela Ronald C.
Nishimura Keiichi
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