Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1997-06-16
1998-12-08
Talbot, Brian K.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 99, 427299, 427250, 4272553, B05D 512
Patent
active
058465979
ABSTRACT:
A precursor liquid comprising several metal 2-ethylhexanoates, such as strontium, tantalum and bismuth 2-ethylhexanoates, in a xylenes/methyl ethyl ketone solvent is prepared, a substrate is placed within a vacuum deposition chamber, a small amount of hexamethyl-disilazane is added to the precursor liquid is misted, and the mist is flowed into the deposition chamber while maintaining the chamber at ambient temperature to deposit a layer of the precursor liquid on the substrate. The liquid is dried, baked, and annealed to form a thin film of a layered superlattice material, such as strontium bismuth tantalate, on the substrate. Then an integrated circuit is completed to include at least a portion of the layered superlattice material film in a component of the integrated circuit.
Derbenwick Gary F.
Hayashi Shinichiro
McMillan Larry D.
Paz De Araujo Carlos A.
Scott Michael C.
Matsushita Electronics Corporation
Symetrix Corporation
Talbot Brian K.
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