Compositions – Etching or brightening compositions
Reexamination Certificate
2005-01-04
2005-01-04
Norton, Nadine G. (Department: 1765)
Compositions
Etching or brightening compositions
C252S079200, C252S079400, C438S689000, C438S745000, C216S057000
Reexamination Certificate
active
06838015
ABSTRACT:
A composition which includes liquid or supercritical carbon dioxide and an acid having a pKa of less than about 4. The composition is employed in a process of removing residue from a precision surface, such as a semiconductor sample, in which the precision surface is contacted with the composition under thermodynamic conditions consistent with the retention of the liquid or supercritical carbon dioxide in the liquid or supercritical state.
REFERENCES:
patent: 4944837 (1990-07-01), Nishikawa et al.
patent: 5185296 (1993-02-01), Morita et al.
patent: 5304515 (1994-04-01), Morita et al.
patent: 5401322 (1995-03-01), Marshall
patent: 5643474 (1997-07-01), Sangeeta
patent: 5783082 (1998-07-01), DeSimone et al.
patent: 5868862 (1999-02-01), Douglas et al.
patent: 5904487 (1999-05-01), Conboy et al.
patent: 5908510 (1999-06-01), McCullough et al.
patent: 5925501 (1999-07-01), Zhang et al.
patent: 5976264 (1999-11-01), McCullough et al.
patent: 5980770 (1999-11-01), Ramachandran et al.
patent: 5981454 (1999-11-01), Small
patent: 6113708 (2000-09-01), Hopple et al.
patent: 6149828 (2000-11-01), Vaartstra
patent: 6565764 (2003-05-01), Hiraoka et al.
Ziger et al., AIchE Journal, 33, No. 10, (10/87).
Cotte John Michael
Goldfarb Dario L.
Jones Pamela
McCullough Kenneth John
Moreau Wayne Martin
International Business Machines - Corporation
Morris, Esq. Daniel P.
Norton Nadine G.
Scully, Scott, Murpy & Presser
Umez-Eronini Lynette T.
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