Liquid metal ion gun

Details Liquid metal ion gun Liquid metal ion gun

2006-02-28

2006-02-28

Lee, John R. (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C250S42300F, C250S424000, C313S360100, C313S362100, C313S363100

Reexamination Certificate

active

07005651

ABSTRACT:
An emitter of a Ga liquid metal ion source is constituted to include W12 of a base material and Ga9 of an ion source element covering a surface as construction materials. By making back-sputtered particles become elements (W and Ga) of the Ga liquid metal ion source, if back-sputtered particles attach to the Ga liquid metal ion source, contamination which may change physical characteristics of Ga9 does not occur. A W aperture is used as a beam limiting (GUN) aperture to place Ga of approx. 25 mg (of melting point of 30° C.) on a surface of a portion included in a beam emission region (Ga store). When emitting ions to the beam limiting (GUN) aperture, Ga in the emission region melts and diffuses on a surface of the beam emission region of the W aperture.

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