Gas separation: processes – Degasification of liquid
Reexamination Certificate
2007-12-04
2007-12-04
Lawrence, Frank M. (Department: 1724)
Gas separation: processes
Degasification of liquid
C222S003000
Reexamination Certificate
active
10867068
ABSTRACT:
This invention relates to an improvement in a low-pressure storage and delivery system for gases having Lewis basicity, particularly hazardous specialty gases such as phosphine and arsine, which are utilized in the electronics industry. The improvement resides in storing the gases in a liquid incorporating a reactive compound having Lewis acidity capable of effecting a reversible reaction between a gas having Lewis basicity. The reactive compound comprises a reactive species that is dissolved, suspended, dispersed, or otherwise mixed with a nonvolatile liquid.
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Brzozowski Jeffrey Richard
Gaffney Thomas Richard
Henderson Philip Bruce
Pearlstein Ronald Martin
Tempel Daniel Joseph
Air Products and Chemicals Inc.
Chase Geoffrey L.
Yang Lina
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