Fluid handling – Line condition change responsive valves – Pilot or servo controlled
Reexamination Certificate
2009-05-20
2011-12-27
Lee, Kevin (Department: 3753)
Fluid handling
Line condition change responsive valves
Pilot or servo controlled
C700S282000, C702S100000
Reexamination Certificate
active
08082946
ABSTRACT:
Fluid control apparatus including a proportional flow valve having a fluid inlet and a fluid outlet; a pneumatic proportional control valve in communication with the proportional flow valve for modulating the proportional flow valve; a frictional flow element having a frictional flow element fluid inlet in fluid communication with the fluid outlet of the proportional flow valve and having a frictional flow element fluid outlet spaced from the frictional flow element fluid inlet, an upstream pressure sensor; a downstream pressure sensor; and a controller in communication with the upstream pressure sensor, the downstream pressure sensor and the pneumatic proportional control valve.
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Gashgaee Iraj
Gonnella George
Laverdiere Marc
Marrs Jennifer
McLoughlin Robert F.
Entegris, Inc.
Lee Kevin
Nields, Lemack & Frame, LLC
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