Liquid ejection head and manufacturing method thereof

Details Liquid ejection head and manufacturing method thereof Liquid ejection head and manufacturing method thereof

2006-09-14

2009-08-11

Feggins, K. (Department: 2861)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

Reexamination Certificate

active

07571991

ABSTRACT:
The liquid ejection head includes: a first SOI substrate which has a first active layer, a first dielectric layer and a first supporting layer; a second SOI substrate which has a second active layer, a second dielectric layer and a second supporting layer, the second active layer being bonded to the first supporting layer; and a nozzle which is formed between the first supporting layer and the second dielectric layer, the nozzle ejecting liquid in an ejection direction perpendicular to a thickness direction of the first SOI substrate and the second SOI substrate, a cross-sectional width of the nozzle perpendicular to the ejection direction being defined by a thickness of the second active layer.

REFERENCES:
patent: 6502930 (2003-01-01), Shimada et al.
patent: 7380318 (2008-06-01), Wada et al.
patent: 6-134994 (1994-05-01), None
patent: 9-216368 (1997-08-01), None
patent: 10-44406 (1998-02-01), None
patent: 2003-34035 (2003-02-01), None

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