Liquid crystal process defect inspection apparatus and...

Optics: measuring and testing – By polarized light examination

Reexamination Certificate

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Reexamination Certificate

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07113278

ABSTRACT:
The glass substrate test apparatus of the liquid crystal cell process comprises a laser unit for generating a laser beam, a beam shaper and beam collimator for shaping the laser beam emitted from the laser unit so as to have an elongated cross section and parallelizing the shaped laser beam, a photo detector for detecting an intensity of double refraction of the shaped laser beam transmitted over the whole glass substrate, a phase defector for measuring the laser double refraction detected by the photo detector and comparing the measured double refraction with a standard laser double refraction, and a polarizer arranged between the laser unit and the beam shaper or between the beam shaper and the beam collimator for polarizing the laser beam to a parallel ray.

REFERENCES:
patent: 5392116 (1995-02-01), Makosch
patent: 5481360 (1996-01-01), Fujita
patent: 5781294 (1998-07-01), Nakata et al.
patent: 6654112 (2003-11-01), Noguchi et al.
PCT International Search Report dated Jun. 25, 2002 corresponding to PCT/KR02/00738.
PCT International Preliminary Examination Report dated Sep. 3, 2003 corresponding to PCT/KR02/00738.

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