Liquid crystal display device and method of manufacturing...

Details Liquid crystal display device and method of manufacturing... Liquid crystal display device and method of manufacturing...

2005-12-29

2008-10-14

Tran, Thien F (Department: 2811)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C438S151000, C438S164000

Reexamination Certificate

active

07435631

ABSTRACT:
An LCD and a method of manufacturing the same using at most six mask processes are provided. An active layer and a storage electrode are simultaneously formed by diffraction exposure. Multiple ion implantations are performed using a photoresist or the gate electrode to mask different areas of an underlying semiconductor. Source and drain electrodes and a pixel electrode are simultaneously formed by diffraction exposure. First and second connection electrodes that lower the contact resistance between the drain electrode and the active layer are formed by a lift-off process.

REFERENCES:
patent: 6617203 (2003-09-01), Kim et al.

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