Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2011-06-21
2011-06-21
Pham, Thanh V (Department: 2894)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C438S030000, C438S151000
Reexamination Certificate
active
07964452
ABSTRACT:
As a substrate gets larger, time of manufacture is increased due to the repetition of film formations and etchings; waste disposal costs of etchant and the like are increased; and material efficiency is significantly reduced. A base film for improving adhesion between a substrate and a material layer formed by a droplet discharge method is formed in the invention. Further, a manufacturing method of a liquid crystal display device according to the invention includes at least one step for forming the following patterns required for manufacturing a liquid crystal display device without using a photomask: a pattern of a material layer typified by a wiring (or an electrode) pattern, an insulating layer pattern; or a mask pattern for forming another pattern.
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Fujii Gen
Kuwabara Hideaki
Maekawa Shinji
Yamazaki Shunpei
Costellia Jeffrey L.
Nixon & Peabody LLP
Pham Thanh V
Semiconductor Energy Laboratory Co,. Ltd.
Tran Tony
LandOfFree
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