Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2005-05-27
2008-12-09
Smith, Zandra (Department: 2822)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C438S030000, C349S043000, C349S046000
Reexamination Certificate
active
07462516
ABSTRACT:
The present invention relates to a method for keeping contact resistance of a pad low. The present invention also discloses a structure of the pad and a method for manufacturing the same, for use in circuit boards and LCD displays. The pad terminal comprises a first metal layer and a second metal layer covering the first metal layer. The second metal layer is removed before the pad terminal is deposited. Thus, the surface of the pad is clean and contact resistance is kept low, because there are no contaminants on the pad. Furthermore, the present invention discloses a pad having a raised part and a depressed part, enlarging the contact area of the pad. Therefore, contact resistance is reduced, and adhesion between the pad and the pad terminal is enhanced.
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Barnes Seth
LG Display Co. Ltd.
McKenna Long & Aldridge LLP
Smith Zandra
LandOfFree
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