Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2005-09-27
2005-09-27
Dang, Trung (Department: 2823)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C438S030000, C438S652000, C438S656000, C438S688000, C257S347000
Reexamination Certificate
active
06949417
ABSTRACT:
In manufacturing an active panel of a liquid crystal display, when a pad portion to which outer driving signals are applied is formed, oxide or nitride layer is generated on the surface of the pads. Since these oxide and nitride layers have a high intrinsic resistance, they cause a reliability of the signal transmission in the pad portion to be decreased. The present invention provides a method for enhancing the reliability of the signal transmission in the pad portion by removing contaminants such as oxide layer and nitride layer and reducing the contact resistance of the pad portion. The present inversion also provides a method for maintaining a good adhesion by forming a surface of the pad portion in an uneven shape and by increasing the contact area. The pad is formed from dual metal layer made by depositing sequentially a first metal layer and a second metal layer. A protection layer is formed by depositing an insulation material such a silicon oxide or silicon nitride on the entire surface of the substrate on which the pad is formed. By etching the protection layer using dry etching method, a pad contact hole is formed on the pad. The second metal of the pad is removed by wet etching method, using the pad contact hole as mask. By doing so, the contaminants between the metal layer and the protection layer can be completely removed. Further, the present invention can have a plurality of pad contact holes to enlarge the contact area between the pad and the pad terminal, and thereby enhancing adhesion between the pad and the pad terminal.
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Dang Trung
LG. Philips LCD Co. Ltd.
McKenna Long & Aldridge LLP
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