Liquid crystal device including tantalum nitride with specific n

Details Liquid crystal device including tantalum nitride with specific n Liquid crystal device including tantalum nitride with specific n

1991-01-23

1992-11-17

Howell, Janice A.

Optical: systems and elements

Holographic system or element

Using a hologram as an optical element

359 87, G02F 11343

Patent

active

051648504

ABSTRACT:
A metal-insulator-metal substrate for a liquid crystal display device including an insulating substrate; a first conductor layer of tantalum nitride formed on a region of the insulating substrate; an insulator layer formed to cover at least a portion of the first conductor layer; a second conductor layer formed to cover at least a portion of the insulator layer; and a pixel element formed on another region of the insulating substrate and connected to the second conductor layer, one of the conductor layers having a nitriding ratio in the range of 0.05 to 0.14 or being formed of sublayers having different nitriding ratios.

REFERENCES:
patent: 4233603 (1980-11-01), Castleberry
patent: 4413883 (1983-11-01), Baraff et al.
patent: 4523811 (1985-06-01), Ota
patent: 4534623 (1985-08-01), Araki
patent: 4586789 (1986-05-01), Kishimoto et al.
patent: 4767189 (1988-08-01), Hayashi et al.
patent: 4917466 (1990-04-01), Nakamura et al.
Baraff et al., "A 68 line Multiplexed Liquid Crystal Display Using MIM Devices", IEEE Conference: Int'l Electronic Devices Meeting (Dec. 8-10, 1980), pp. 707-710.
Baraff et al., "The Optimization of MIM Non-Linear Devices for Use in Multiplexed Liquid Crystal Displays" vol. ed-28, No. 6, Jun. 1981, pp. 736-739.
1980 Sid International Symposium, Digest of Technical Papers, vol. IX, Apr. 1980, pp. 200-201 D. R. Barraff et al, Application of Metal Insulator Metal Non--Linear Devices and Multiplexed Liquid Crystal Display.

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