Liquid coating device

Details Liquid coating device Liquid coating device

1990-05-21

1992-07-07

Wityshyn, Michael G.

Coating apparatus

Control means responsive to a randomly occurring sensed...

Temperature responsive

118666, 118712, 118 52, 118 56, 427240, B05B 124

Patent

active

051273624

ABSTRACT:
A liquid coating device for coating a solution on a substrate to form a film includes a chuck for rotatably supporting the substrate, a nozzle for supplying the solution on the substrate, a heater provided in the nozzle for changing a temperature of the solution, a sensor for measuring a temperature of an ambient atmosphere of the substrate, and a controller for controlling the heater according the measured temperature. Thus, a solution having a temperature corresponding to the temperature of the ambient atmosphere is supplied from the nozzle to the substrate.

REFERENCES:
patent: 2699080 (1987-10-01), Finney
patent: 4738219 (1988-04-01), Fujisawa
patent: 4932353 (1990-06-01), Kawata et al.

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