Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2006-10-31
2006-10-31
Walke, Amanda (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S270100
Reexamination Certificate
active
07129020
ABSTRACT:
Disclosed is a liquid coating composition for forming a top antireflective film that contains a polymer, the polymer containing, as a structural unit, a (meth)acrylate unit that has at least one polycyclic hydrocarbon group on its side chain and becomes more soluble to alkali by the action of an acid, the liquid coating composition comprising: (a) a water-soluble, film-forming component; (b) at least one fluorine-based compound selected from a perfluoroalkylcarboxylic acid having 4 or more carbon atoms and a perfluoroalkylsulfonic acid having 5 or more carbon atoms; and (c) a fluoroalkylsulfonic acid having 1–4 carbon atoms and/or an acidic compound consisting of a hydrocarbon having 1–4 carbon atoms in which one or more hydrogen atoms are substituted with a fluoloalkylsulfonyl group(s), with the proviso that one or more carbon atoms therein may be substituted with a nitrogen atom(s).
REFERENCES:
patent: 5611850 (1997-03-01), Nishi et al.
patent: 5853471 (1998-12-01), Yoshida et al.
patent: 6027856 (2000-02-01), Nozaki et al.
patent: 6309789 (2001-10-01), Takano et al.
patent: 6692892 (2004-02-01), Takano et al.
patent: 1272864 (2000-11-01), None
Haraguchi Takayuki
Kubota Naotaka
Wakiya Kazumasa
Yokoi Shigeru
Tokyo Ohka Kogyo Co. Ltd.
Walke Amanda
Wenderoth , Lind & Ponack, L.L.P.
LandOfFree
Liquid coating composition for forming a top antireflective... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Liquid coating composition for forming a top antireflective..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Liquid coating composition for forming a top antireflective... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3718377