Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1989-10-25
1991-01-08
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
250561, H01J 314
Patent
active
049838270
ABSTRACT:
A linescan apparatus for detecting salient pattern on a surface of a product comprises: a laser light source for continuously emitting a laser beam; a polygon mirror for reflecting the laser beam; a drive for rotating the polygon mirror to scan said laser beam; an f.theta. lens arranged such that the linescan laser beam strikes against the plane perpendicularly; a carrying device for moving the product in the direction substantially perpendicular to the plane; a mirror for reflecting the linescan laser beam reflected at a surface of the product to direct the linescan laser beam to the polygon mirror through the f.theta. lens, the mirror being positioned apart from the second plane; and a beam position detector for detecting unidimensional position of a spot mede by the linescan laser beam projected thereon from the mirror via the polygon mirror. This linescan apparatus provides three-dimensional data of a surface of the product. The detected position signal is compared by reference data for inspecting the product. An linescan apparatus further comprises second beam position detector and an averaging circuit for averaging outputs from first mentioned and second beam detectors.
REFERENCES:
patent: 4642813 (1987-02-01), Wilder
patent: 4681453 (1987-07-01), Sick
patent: 4775238 (1988-10-01), Weber
patent: 4811410 (1989-03-01), Amir et al.
Araki Nobuhiro
Ikegaya Kazutoshi
Maruyama Yuji
Sannomiya Kunio
Toba Hiroto
Matsushita Electric - Industrial Co., Ltd.
Nelms David C.
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