Conveyors: power-driven – With means to facilitate working – treating – or inspecting... – Means to transfer a load back and forth between the mainline...
Reexamination Certificate
2005-07-07
2008-10-21
Bidwell, James R (Department: 3651)
Conveyors: power-driven
With means to facilitate working, treating, or inspecting...
Means to transfer a load back and forth between the mainline...
C414S217000, C118S719000
Reexamination Certificate
active
07438175
ABSTRACT:
Embodiments of a vacuum conveyor system are provided herein. In one embodiment a vacuum conveyor system includes a first vacuum sleeve having a plurality of rollers that support and move substrates through the first vacuum sleeve. A port is provided for sealably coupling the first vacuum sleeve to a process chamber. A first substrate handler is disposed proximate the port. Multiple ports may be provided for sealably coupling the first vacuum sleeve to a plurality of process chambers. A dedicated substrate handler is provided for each process chamber. A second vacuum sleeve may be sealably coupled to an opposing side of the process chambers. The vacuum conveyor system may be modular with independent modules linked via load lock chambers. The plurality of rollers may compensate for any sag of the leading edge of a substrate being transported thereupon.
REFERENCES:
patent: 4483651 (1984-11-01), Nakane et al.
patent: 4500407 (1985-02-01), Boys et al.
patent: 5425611 (1995-06-01), Hughes et al.
patent: 6176668 (2001-01-01), Kurita et al.
patent: 6206176 (2001-03-01), Blonigan et al.
patent: 6213704 (2001-04-01), White et al.
patent: 6235634 (2001-05-01), White et al.
patent: 6286230 (2001-09-01), White et al.
patent: 6298685 (2001-10-01), Tepman
patent: 6471459 (2002-10-01), Blonigan et al.
patent: 6485248 (2002-11-01), Taylor, Jr.
patent: 6517303 (2003-02-01), White et al.
patent: 6634845 (2003-10-01), Komino
patent: 6679671 (2004-01-01), Blonigan et al.
patent: 6808592 (2004-10-01), Rigali et al.
patent: 6919001 (2005-07-01), Fairbairn et al.
patent: 6971832 (2005-12-01), Ackeret et al.
PCT Notification of Transmittal of the International Search Report and Written Opinion for PCT/US06/09090 dated Oct. 20, 2006. (APPM/010229 PCT).
Blonigan Wendell T.
White John M.
Applied Materials Inc.
Bidwell James R
Patterson & Sheridan LLP
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