Line-width measurements of metallization coated with insulator o

Details Line-width measurements of metallization coated with insulator o Line-width measurements of metallization coated with insulator o

1993-09-09

1995-05-09

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, 250399, H01J 3728

Patent

active

054142652

ABSTRACT:
A semiconductor device conductive line width non-destructive measuring sym comprises an electron beam source of sufficient energy to penetrate the passivation coating over conductive line traces and means for scanning the electron beam across the surface. An x-ray monitor to monitor x-rays produced in the conductive traces by the scanning electron beam produces an accurate measurement of the line width and spacing of the conductive traces.

REFERENCES:
patent: 4751384 (1988-06-01), Murakoshi et al.

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