Line-width measurement adjusting method and scanning...

Details Line-width measurement adjusting method and scanning... Line-width measurement adjusting method and scanning...

2007-03-23

2010-02-16

Vanore, David A (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C250S311000, C850S008000, C850S009000, C850S010000, C850S011000

Reexamination Certificate

active

07663103

ABSTRACT:
A line-width measurement adjusting method, which is used when first and second electron beam intensity distributions for measuring a line width are produced from intensity distribution images of secondary electrons obtained respectively by scanning a first irradiation distance with an electron beam at first magnification, and by scanning a second irradiation distance with an electron beam at second magnification, includes the step of adjusting the second electron beam intensity distribution of the electron beam at the second magnification such that the second electron beam intensity distribution is equal to the first electron beam intensity distribution of the electron beam at first magnification. The second electron beam intensity distribution may be adjusted by increasing or decreasing a second irradiation distance when producing the electron beam intensity distribution.

REFERENCES:
patent: 4038543 (1977-07-01), Krisch et al.
patent: 5750990 (1998-05-01), Mizuno et al.
patent: 6476388 (2002-11-01), Nakagaki et al.
patent: 2001/0035495 (2001-11-01), Nagai et al.
patent: 05-296754 (1993-11-01), None
patent: 09-184714 (1997-07-01), None

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