Limiting electric current type oxygen sensor with heater and lim

Chemistry: electrical and wave energy – Apparatus – Electrolytic

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204426, 204408, G01N 2758

Patent

active

045100365

ABSTRACT:
The invention provides a limiting electric current type oxygen sensor with a microheater, having: an oxygen ionic conductor; an anode and a cathode respectively formed on two major surfaces of the oxygen ionic conductor; an insulating film which has a porosity of not less than 0.2 [%], an average pore diameter of not less than 140 [.ANG.], and a thickness between 0.2 [.mu.m] and 10 [.mu.m], and which is formed on one of the anode and the cathode so as to regulate a flow rate of oxygen gas and to provide electrical insulation; and the microheater formed on the insulating film. The oxygen ionic conductor is electrically insulated from the microheater through the insulating film. The invention also provides a limiting electric current type oxygen concentration detecting device having the limiting electric current type oxygen sensor and a constant temperature control circuit.

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