Optical: systems and elements – Having significant infrared or ultraviolet property – Having folded optical path
Reexamination Certificate
2007-03-27
2007-03-27
Ben, Loha (Department: 2873)
Optical: systems and elements
Having significant infrared or ultraviolet property
Having folded optical path
C359S290000, C359S291000, C359S850000, C359S857000, C359S298000, C378S034000, C378S145000, C355S053000, C355S067000, C250S492200, C250S50400H
Reexamination Certificate
active
10512100
ABSTRACT:
A lighting system, particularly for use in extreme ultraviolet (EUV) lithography, comprising a projection lens for producing semiconductor elements for wavelengths ≦193 nm is provided with a light source, an object plane, an exit pupil, a first optical element having first screen elements for producing light channels, and with a second optical element having second screen elements. A screen element of the second optical element is assigned to each light channel that is formed by one of the first screen elements of the first optical element. The screen elements of the first optical element and of the second optical element can be configured or arranged so that they produce, for each light channel, a continuous beam course from the light source up to the object plane. The angles of the first screen elements of the first optical element can be adjusted in order to modify a tilt. The location and/or angles of the second screen elements of the second optical element can be adjusted individually and independently of one another in order to realize another assignment of the first screen elements of the first optical element to the second screen elements of the second optical element by displacing and/or tilting the first and second screen elements.
REFERENCES:
patent: 3077958 (1963-02-01), Grimsey
patent: 3802781 (1974-04-01), Wright
patent: 3837125 (1974-09-01), Johnson
patent: 3879105 (1975-04-01), Broche et al.
patent: 3917385 (1975-11-01), Caswell
patent: 4038971 (1977-08-01), Bezborodko
patent: 4060315 (1977-11-01), Heinz
patent: 4092518 (1978-05-01), Merard
patent: 4162120 (1979-07-01), Moreno
patent: 4195913 (1980-04-01), Dourte et al.
patent: 4202605 (1980-05-01), Heinz
patent: 4226507 (1980-10-01), Fuschetto
patent: 4236296 (1980-12-01), Woolhouse et al.
patent: 4277141 (1981-07-01), Kleiber
patent: 4295710 (1981-10-01), Heinz
patent: 4348090 (1982-09-01), Iizuka
patent: 4380391 (1983-04-01), Buser et al.
patent: 4389115 (1983-06-01), Richter
patent: 4403421 (1983-09-01), Shepherd
patent: 4408874 (1983-10-01), Zinky et al.
patent: 4659225 (1987-04-01), Takahashi
patent: 4672439 (1987-06-01), Florence et al.
patent: 4674874 (1987-06-01), Halldorsson et al.
patent: 4705369 (1987-11-01), Humpal
patent: 4710276 (1987-12-01), Kull
patent: 4722592 (1988-02-01), Stolfi
patent: 4740276 (1988-04-01), Marmo et al.
patent: 4826304 (1989-05-01), Guch et al.
patent: 4849668 (1989-07-01), Crawley et al.
patent: 4865454 (1989-09-01), Lazzarini et al.
patent: 4871237 (1989-10-01), Anzai et al.
patent: 4932770 (1990-06-01), Caravaty
patent: 4932778 (1990-06-01), Parra
patent: 4953965 (1990-09-01), Iwase et al.
patent: 4959531 (1990-09-01), Marino
patent: 4967088 (1990-10-01), Stengl et al.
patent: 4969726 (1990-11-01), Koning
patent: 5025284 (1991-06-01), Komoriya et al.
patent: 5026977 (1991-06-01), Hubbard, Jr.
patent: 5074654 (1991-12-01), Alden et al.
patent: 5079414 (1992-01-01), Martin
patent: 5132979 (1992-07-01), Erbert
patent: 5157555 (1992-10-01), Reno
patent: 5204712 (1993-04-01), Bouwer et al.
patent: 5210650 (1993-05-01), O'Brien et al.
patent: 5339346 (1994-08-01), White
patent: 5339720 (1994-08-01), Pellarin et al.
patent: 5361292 (1994-11-01), Sweatt
patent: 5400184 (1995-03-01), Kuklo
patent: 5414557 (1995-05-01), Phillips
patent: 5428482 (1995-06-01), Bruning et al.
patent: 5438451 (1995-08-01), Schweizer
patent: 5485053 (1996-01-01), Baz
patent: 5529277 (1996-06-01), Ostaszewski
patent: 5537262 (1996-07-01), Aoki et al.
patent: 5581605 (1996-12-01), Murakami et al.
patent: 5642237 (1997-06-01), Miyawaki et al.
patent: 5694257 (1997-12-01), Arnone et al.
patent: 5719846 (1998-02-01), Matoba et al.
patent: 5724017 (1998-03-01), Pla et al.
patent: 5737137 (1998-04-01), Cohen et al.
patent: 5784355 (1998-07-01), Abe
patent: 5870133 (1999-02-01), Naiki
patent: 5891317 (1999-04-01), Teichmann et al.
patent: 5986795 (1999-11-01), Chapman et al.
patent: 5986827 (1999-11-01), Hale
patent: 6033079 (2000-03-01), Hudyma
patent: 6054784 (2000-04-01), Sperling et al.
patent: 6108121 (2000-08-01), Mansell et al.
patent: 6118577 (2000-09-01), Sweatt et al.
patent: 6144511 (2000-11-01), Umetsu et al.
patent: 6160628 (2000-12-01), Inoue
patent: 6166868 (2000-12-01), Holderer et al.
patent: 6195201 (2001-02-01), Koch et al.
patent: 6208407 (2001-03-01), Loopstra
patent: 6210865 (2001-04-01), Sweatt et al.
patent: 6225027 (2001-05-01), Replogle et al.
patent: 6229657 (2001-05-01), Holderer et al.
patent: 6246822 (2001-06-01), Kim et al.
patent: 6252334 (2001-06-01), Nye et al.
patent: 6252648 (2001-06-01), Hase et al.
patent: 6252712 (2001-06-01), Furter et al.
patent: 6259571 (2001-07-01), Holderer et al.
patent: 6275344 (2001-08-01), Holderer
patent: 6290363 (2001-09-01), Masutani
patent: 6296811 (2001-10-01), Sasaki
patent: 6307688 (2001-10-01), Merz et al.
patent: 6337484 (2002-01-01), Loopstra et al.
patent: 6341006 (2002-01-01), Murayama et al.
patent: 6369959 (2002-04-01), Trunz et al.
patent: 6373552 (2002-04-01), Braat et al.
patent: 6392825 (2002-05-01), Trunz et al.
patent: 6405533 (2002-06-01), Rastegar et al.
patent: 6411368 (2002-06-01), Matsumoto et al.
patent: 6411426 (2002-06-01), Meehan et al.
patent: 6428173 (2002-08-01), Dhuler et al.
patent: 6445515 (2002-09-01), Moennig
patent: 6445516 (2002-09-01), Osterried
patent: 6449106 (2002-09-01), Spinali
patent: 6466380 (2002-10-01), Bischoff
patent: 6469827 (2002-10-01), Sweatt et al.
patent: 6473247 (2002-10-01), Keller et al.
patent: 6478434 (2002-11-01), Streetman et al.
patent: 6496466 (2002-12-01), Lee et al.
patent: 6501605 (2002-12-01), Moriya
patent: 6503383 (2003-01-01), Holderer et al.
patent: 6509670 (2003-01-01), Jeong et al.
patent: 6521892 (2003-02-01), Emanuel et al.
patent: 6537479 (2003-03-01), Colea
patent: 6538829 (2003-03-01), Rau et al.
patent: 6539142 (2003-03-01), Lemoff et al.
patent: 6549692 (2003-04-01), Harel et al.
patent: 6552862 (2003-04-01), Dieker
patent: 6560384 (2003-05-01), Helkey et al.
patent: 6566627 (2003-05-01), Brandinger et al.
patent: 6580570 (2003-06-01), Becker et al.
patent: 6585379 (2003-07-01), Yokoyama et al.
patent: 6594057 (2003-07-01), Drake et al.
patent: 6594093 (2003-07-01), Moeller et al.
patent: 6603615 (2003-08-01), Melzer et al.
patent: 6614504 (2003-09-01), Aoki
patent: 6628371 (2003-09-01), Ishikawa
patent: 6633107 (2003-10-01), Calabro et al.
patent: 6646713 (2003-11-01), Ishii
patent: 6653887 (2003-11-01), Haeusser-Boehm et al.
patent: 6658084 (2003-12-01), Singer
patent: 6667255 (2003-12-01), Hexels
patent: 6667839 (2003-12-01), Hartmaier et al.
patent: 6717742 (2004-04-01), Weber
patent: 6727984 (2004-04-01), Becht
patent: 6729062 (2004-05-01), Thomas et al.
patent: 6733369 (2004-05-01), Stacklies et al.
patent: 6768567 (2004-07-01), Naulleau
patent: 6768600 (2004-07-01), Dieker
patent: 6791768 (2004-09-01), Rau
patent: 6798494 (2004-09-01), Naulleau
patent: 6798588 (2004-09-01), Vogt
patent: 6816325 (2004-11-01), Becker et al.
patent: 6825914 (2004-11-01), Schroeder et al.
patent: 6829107 (2004-12-01), Osterried
patent: 6844994 (2005-01-01), Melzer et al.
patent: 6853440 (2005-02-01), Van De Pasch et al.
patent: 6870554 (2005-03-01), Jain
patent: 6964485 (2005-11-01), Singer et al.
patent: 2002/0021903 (2002-02-01), Ito et al.
patent: 2002/0163741 (2002-11-01), Shibazaki
patent: 2002/0167740 (2002-11-01), Osterried et al.
patent: 2002/0176094 (2002-11-01), Petasch et al.
patent: 2004/0119961 (2004-06-01), Singer et al.
patent: 2004/0232354 (2004-11-01), Singer et al.
patent: 199 03 807 (1999-11-01), None
patent: 100 15 953 (2000-10-01), None
patent: 199 36 568 (2001-02-01), None
patent: 100 53 587 (2002-05-01), None
patent: 101 20 446 (2002-11-01), None
patent: 0 939 341 (1999-02-01), None
patent: 0 939 341 (1999-02-01), None
patent: 1 026 547 (2000-01-01), None
patent: WO86 05281 (1986-09-01), None
patent: WO99 66542 (1999-12-01), None
Ellis, “Low-cost Bimorph Mirrors in Adaptice Optics,” Imperial College of science, Technology & Medicine, University of London, 1999.
Sato et al., Adaptive PVDF piezoelectric deformable mirror system, Ap
Melzer Frank
Singer Wolfgang
Ben Loha
Carl Zeiss SMT AG
Wells St. John P.S.
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