Light sensitive compositions of polymethyl isopropenyl ketone

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

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20415914, 20415922, 430311, 430322, 430918, 526316, G03C 168, C08F 800

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042437407

ABSTRACT:
A sensitive composition comprising polymethyl isopropenyl ketone of limited molecular weight and a compound of a given general formula. The formation of a pattern of less than 1 .mu.m is made possible by employing ultraviolet rays of wave lengths of 100-350 nm in place of those of 350-450 nm utilized in conventional processes. The sensitive composition is highly sensitive to ultraviolet rays in said wave range and reproduces a fine pattern precisely.

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Lin, Jour. of the Vacuum Science and Technology, 12 (6), pp. 1317-1320, (1975).
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