Light-sensitive composition

Details Light-sensitive composition Light-sensitive composition

1992-12-03

1996-11-19

Dote, Janis L.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430326, 430955, G03C 1492, G03F 7004

Patent

active

055761437

ABSTRACT:
A positive type or negative type light-sensitive composition providing high sensitivity and high resolution in the manufacture of a semiconductor device, and contains:

REFERENCES:
patent: 5069998 (1991-12-01), Schwalm et al.
patent: 5110709 (1992-05-01), Aoai et al.
patent: 5206117 (1993-04-01), Labadie et al.
Patent & Trademark Office English Language Translation of Japanese Patent 4-51243 (pub. Feb. 19, 1992).

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