Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-07-11
2006-07-11
Ben, Loha (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S295000, C438S050000, C216S002000, C257S415000
Reexamination Certificate
active
07075701
ABSTRACT:
Described are MEMS mirror arrays monolithically integrated with CMOS control electronics. The MEMS arrays include polysilicon or polysilicon-germanium components that are mechanically superior to metals used in other MEMS applications, but that require process temperatures not compatible with conventional CMOS technologies. CMOS circuits used with the polysilicon or polysilicon-germanium MEMS structures use interconnect materials that can withstand the high temperatures used during MEMS fabrication. These interconnect materials include doped polysilicon, polycides, and tungsten metal.
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Novotny Vlad
Reddy Chitranjan N.
Sastri Bharat
Active Optical Networks, Inc.
Behiel Arthur J.
Ben Loha
Dinh Jack
Silicon Edge Law Group
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