Coating processes – Electrical product produced – Fluorescent or phosphorescent base coating
Reexamination Certificate
2001-09-07
2008-12-09
Meeks, Timothy (Department: 1792)
Coating processes
Electrical product produced
Fluorescent or phosphorescent base coating
C427S069000, C427S255290, C427S255320, C427S282000, C118S719000, C118S720000, C118S733000, C118S070000, C204S192290
Reexamination Certificate
active
07462372
ABSTRACT:
A method of manufacturing a light emitting device of upward emission type and a thin film forming apparatus used in the method are provided. A plurality of film forming chambers are connected to a first transferring chamber. The plural film forming chambers include a metal material evaporation chamber, an EL layer forming chamber, a sputtering chamber, a CVD chamber, and a sealing chamber. By using this thin film forming apparatus, an upward emission type EL element can be fabricated without exposing the element to the outside air. As a result, a highly reliable light emitting device is obtained.
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Konuma Toshimitsu
Yamazaki Hiroko
Fish & Richardson P.C.
Lin Jimmy
Meeks Timothy
Semiconductor Energy Laboratory Co,. Ltd.
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