Elevator – industrial lift truck – or stationary lift for vehicle – Having specific load support drive-means or its control – Includes fluid supporting ram in drive-means
Patent
1996-12-04
1998-12-15
Noland, Kenneth
Elevator, industrial lift truck, or stationary lift for vehicle
Having specific load support drive-means or its control
Includes fluid supporting ram in drive-means
187406, 414935, 118729, 118728, B66B 904
Patent
active
058486704
ABSTRACT:
Apparatus for lifting a wafer, or other such workpiece, from the surface of pedestal in a semiconductor wafer processing system. More specifically, the apparatus relates to a lift pin that is guided by a guide bushing and a guide pin. Preferably, the lift pin is hollow and is slideably engaged with a guide pin. The guide pin is fixed relative to the pedestal and coaxially aligned with a lift pin bore in the pedestal. An actuator drives the lift pin along the guide pin from a fully retracted lift pin position to a fully extended lift pin position. A guide bushing, located in the pedestal proximate the lift pin, also guides the lift pin as the pin passes through the lift pin bore. The guide bushing forms a lip seal between the lift pin and the pedestal. Furthermore, a bellows surrounding the lift pin and the guide pin, can also be used to preserve the integrity of the chamber environment.
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Applied Materials Inc.
Noland Kenneth
Tran Khoi H.
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