Lift pin driving device and a flat panel display...

Details Lift pin driving device and a flat panel display... Lift pin driving device and a flat panel display...

2011-08-02

2011-08-02

Gramaglia, Maureen (Department: 1716)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With workpiece support

C118S728000, C118S729000, C156S345510

Reexamination Certificate

active

07988817

ABSTRACT:
A lift pin driving device and a flat panel display (FPD) manufacturing apparatus having the device are provided. The lift pin driving device can precisely move a plurality of lift pins using one motor, thus realizing a simple lift pin driving structure and a simple motor control structure. This allows a space below a chamber body of the manufacturing apparatus to be configured in a variety of ways, thus reducing the cost of equipment and the production cost of products.

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patent: 5355744 (1994-10-01), Yanagisawa
patent: 6739208 (2004-05-01), Hyakudomi
patent: 6789585 (2004-09-01), Janke
patent: 7018555 (2006-03-01), Shimbara et al.
patent: 01091923 (1989-04-01), None
English Machine Translation of JP01-091923A. Performed and printed on Mar. 10, 2010 from http://www4.ipdl.inpit.go.jp/.

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