Lift-out probe having an extension tip, methods of making...

Details Lift-out probe having an extension tip, methods of making... Lift-out probe having an extension tip, methods of making...

2006-03-07

2006-03-07

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S307000, C250S492100, C250S492300, C438S464000

Reexamination Certificate

active

07009188

ABSTRACT:
Extension tips for lift-out probes used in conjunction with focused ion beam (FIB) systems and analytical instruments employing such probes are disclosed. Methods of forming the extension tips from a variety of materials such as a silicon wafer, preformed whiskers of conductive material, and metal lines or contacts removed from integrated circuits are also disclosed. Methods of using a variety of extension tips pre-placed within the FIB system to enable reconditioning worn or damaged lift-out probes are also disclosed.

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LEO 1560 Cross Beam, Applications Overview, 37 pages.

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