Lid liner for chemical vapor deposition chamber

Details Lid liner for chemical vapor deposition chamber Lid liner for chemical vapor deposition chamber

2005-06-28

2005-06-28

Lund, Jeffrie R. (Department: 1763)

Coating apparatus

Gas or vapor deposition

C118S733000, C029S801000, C029S234000, C029S243500, C156S345240

Reexamination Certificate

active

06911093

ABSTRACT:
A lid liner for a chemical vapor deposition chamber includes an annular portion having an inner surface for surrounding a reaction volume within the chemical deposition chamber; a mounting tab formed on an outer surface of the annular portion; and a hole formed in the mounting tab for receiving a fastener wherein the hole does not penetrate the inner surface of the annular portion.

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