Lid assembly for a substrate processing chamber

Details Lid assembly for a substrate processing chamber Lid assembly for a substrate processing chamber

2011-08-02

2011-08-02

Davis, Antoine D (Department: 2917)

Machines not elsewhere specified

Heat treatment, welding or brazing

Scientific, laboratory, or industrial heating equipment

Design Patent

active

D0642605

CLAIM:
The ornamental design for a lid assembly for a substrate processing chamber, as shown and described.

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Tam, et al., U.S. Appl. No. 12/831,522, filed Jul. 7, 2010, entitled “Showerhead Assembly With Metrology Port Purge.”

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