Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent
1992-08-27
1995-03-28
Dees, Jose G.
Cleaning and liquid contact with solids
Processes
Including application of electrical radiant or wave energy...
134 21, 134 26, 148525, 148558, 451 38, 451 39, B08B 312, B08B 310, B24B 100
Patent
active
054013194
ABSTRACT:
Replaceable parts for a vacuum chamber including an aluminum lid and a quartz door and shield, are treated to clean and roughen their surfaces to increase adhesion of materials deposited thereon during substrate processing in said chamber, thereby reducing downtime of the equipment. The parts can be chemically cleaned, rinsed to remove the chemicals and dried in a first step; subjected to bead blasting to roughen the surface of the part and improve adhesion thereon of deposited material; in a succeeding step the part to be cleaned ultrasonically in order to remove all loose particles; and in a last step the parts rinsed and dried to remove moisture, prior to packaging or using the part. A novel single-piece machined aluminum lid has an extension wall from a first surface that fits into the door of the chamber, and an overlying portion of said first surface that sealingly engages the door when the lid is closed.
REFERENCES:
patent: 5017439 (1991-05-01), Brar et al.
patent: 5051375 (1991-09-01), Sakata et al.
patent: 5202008 (1993-04-01), Talieh et al.
Search Report-EP (1993).
Lee et al, "adhesion studies . . . " 2194 Thin Solid Films 185 (1990) Feb., No. 12 Lausanne, CH pp. 35-55.
Banholzer Thomas
Marohl Dan
Mintz Donald M.
Tepman Avi
Applied Materials Inc.
Dees Jos,e G.
Jones Dwayne C.
Morris Birgit E.
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