Optical: systems and elements – Having significant infrared or ultraviolet property – Including alternative optical path or optical element
Patent
1991-10-25
1993-05-18
Arnold, Bruce Y.
Optical: systems and elements
Having significant infrared or ultraviolet property
Including alternative optical path or optical element
359355, 359723, 359724, 359740, 359784, 359799, 359800, G02B 1314, G02B 300, G02B 912
Patent
active
052125890
ABSTRACT:
A lens system having discrete variations of focal length at discrete distances of radius outward from the optic axis for focussing light of plural wavelengths. The lens system which directs a laser beam onto a target for ablation or exposure applications includes one set of lens elements to handle short wavelength light used for ablation or exposure applications, and another set of lens elements to handle long wavelength light used for alignment applications. The lens system which provides for the ablation or exposure functions at short wavelength and for through-the-lens alignment at a longer wavelength and higher numerical aperture consists of three elements. Two outer lens elements are made entirely of fused quartz. An inner element disposed between the two outer lens is composed of any material such as optical glass. The inner lens element has a hole ground through its center.
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Arnold Bruce Y.
Goodwin John J.
International Business Machines - Corporation
Parsons David R.
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