Lens for a scanning electron microscope

Details Lens for a scanning electron microscope Lens for a scanning electron microscope

2005-06-14

2005-06-14

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

Reexamination Certificate

active

06906335

ABSTRACT:
A lens (15) for a scanning electron microscope is adapted to be removably mounted on a specimen stage (1). The lens (15) includes a magnetic circuit (2, 3, 4, 7) having a first magnetic pole piece (7) and a second magnetic pole piece (4), and a specimen holder (5). The specimen holder (5) is located between the first and second magnetic pole pieces (4, 7). The magnetic circuit (2, 3, 4, 7) also includes a lens bore (18) to permit an electron beam (9) to strike a surface of a specimen mounted on the specimen holder (5), in use. The lens bore (18) has a width of greater than 1 mm.

REFERENCES:
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patent: 5371371 (1994-12-01), Yamazaki et al.
patent: 5981947 (1999-11-01), Nakasuji et al.
patent: 58115383 (1983-09-01), None
patent: 63 224137 (1988-09-01), None
patent: 06176729 (1994-06-01), None
Pawley, J.B., “Practical Aspects of High-Resolution LVSEM,”Scanning, vol. 12, P247-252, 1990.
Reimer, L.,Scanning Electron Microscopy, Physics of Image Formation and Microanalysis, Spinger, 2nd Edition, 1998, P27, Section 2.2.3.
JSM-6000F, JEOL, 1-2 Musashino 3-Chroms, Akishima Tokyo 196.
Hitachi S-5000, Hitachi Japan.

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