Lens coil cooling of a magnetic lens

Details Lens coil cooling of a magnetic lens Lens coil cooling of a magnetic lens

2008-03-13

2011-10-25

Maskell, Michael (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S3960ML

Reexamination Certificate

active

08044368

ABSTRACT:
A magnetic lens for a charged particle beam device and a charged particle beam device are provided. The magnetic lens includes a coil with coil windings to be excited for generation of a magnetic field, a pole piece to guide the magnetic field, a heat shield, which is connected to a cooling system, and a thermal insulation layer provided between the heat shield and the coil.

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