Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2007-02-06
2007-02-06
Paik, Sang Y. (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C392S418000
Reexamination Certificate
active
10956165
ABSTRACT:
A reactor chamber is positioned between a top array of LED heat lamps and a bottom array of LED heat lamps. The LED heat lamps forming the top and bottom arrays are individually or controllable in groups such that power output along each array of LED heat lamps can dynamically differ. The LED lamps can be controlled in response to, for example, feedback from chamber sensors, a desired temperature profile, and a failed LED lamp. In this way, the methods and systems described herein can dynamically compensate for operational characteristics of the reactor chamber. In one configuration, the LED heat lamps are arranged in a rectangular pattern. In some configurations, the LED heat lamps are arranged in a circular or a concentric pattern.
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ASM America Inc.
Knobbe Martens Olson & Bear LLP
Paik Sang Y.
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