Leakage gas detector for semiconductor device and leakage gas de

Details Leakage gas detector for semiconductor device and leakage gas de Leakage gas detector for semiconductor device and leakage gas de

1996-11-07

1998-03-17

Williams, Hezron E.

Measuring and testing

With fluid pressure

Leakage

73 405R, 73 493, 73 491, G01M 318, G01N 3108

Patent

active

057289409

ABSTRACT:
A leakage gas detector for a semiconductor device includes a plurality of inflow apertures into which leakage gas flows. A detector sequentially detects the leakage gas in each of the inflow apertures via a plurality of valves, so as to leak test each of the plurality of inflow apertures for presence of possible leakage gas. Each of the plurality of valves are connected to corresponding of the plurality of inflow apertures to control the suction of the leakage gas into the detector. A controller selectively opens and closes each of the plurality of valves.

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patent: 4364261 (1982-12-01), Askwith et al.
patent: 4380168 (1983-04-01), Ibe
patent: 5384714 (1995-01-01), Kidd

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